Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1988-02-25

1989-06-20

Berman, Jack I.

Radiant energy

Ionic separation or analysis

With sample supply means

250304, 250306, 250399, 250397, H01J 37256

Patent

active

048411434

ABSTRACT:
A charged particle beam apparatus is disclosed, which comprises a charged particle source; focusing means for focusing a charged particle beam emitted by the charged particle source on a sample and irradiating it therewith; deflecting means for deflecting the charged particle beam so as to scan the sample therewith; secondary ion separating means disposed approximately symmetrically with respect to the axis of the charged particle beam at the proximity of said sample and separating positive and negative secondary ions generated by the irradiation of the sample into positive and negative ions; and mass analyzers for analyzing the mass of the separated positive and negative secondary ions, respectively.

REFERENCES:
patent: 4266127 (1981-05-01), Chang
patent: 4479060 (1984-10-01), Tamura et al.
patent: 4564758 (1986-01-01), Slodzian et al.
patent: 4740697 (1988-04-01), Suzuki

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