Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate
2005-03-08
2005-03-08
Lee, John R. (Department: 2881)
Radiant energy
Means to align or position an object relative to a source or...
Reexamination Certificate
active
06864493
ABSTRACT:
An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
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Ezumi Makoto
Otaka Tadashi
Ozawa Yasuhiko
Sato Mitsugu
Takane Atsushi
Dickstein , Shapiro, Morin & Oshinsky, LLP
Hitachi , Ltd.
Johnston Phillip
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