Charged particle analyzer

Details Charged particle analyzer Charged particle analyzer

1987-11-13

1989-07-18

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250309, H01J 4000, H01J 4700

Patent

active

048496294

ABSTRACT:
A charged particle analyzer comprises a spherical grid, a spherical electrode, a screen plate, and a detector. The spherical electrode is outside of the spherical grid and is concentric with the spherical grid. The screen plate has an entry window and an exit opening, which are symmetrical with the center of the sphere of the spherical grid. A sample is disposed at the entry window of the screen plate. The detector is positioned behind the exit opening to detect charged particles emitted from the sample. The charged particles having the same energy can travel through the exit opening of the screen plate, and their amount or their angular distribution is measured.

REFERENCES:
patent: 4255656 (1981-03-01), Barrie et al.
patent: 4546254 (1985-10-01), Yamauchi
patent: 4633084 (1986-12-01), Gruen et al.
patent: 4728790 (1988-03-01), Plies

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