Charged-particle analyzer

Details Charged-particle analyzer Charged-particle analyzer

1994-03-25

1996-04-09

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250310, H01J 4700

Patent

active

055064140

ABSTRACT:
The invention provides apparatus and methods for investigating a small selected area of the surface of a specimen. The specimen is irradiated by a primary beam of X-rays or electrons to cause it to emit electrons. These are collected by a novel electron-optical arrangement and are used to create an image of the selected area of the surface using only those electrons emitted with energies lying in a specified range. Apparatus according to the invention has greater sensitivity and spatial resolution than previously known apparatus.

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Prutton, M. Surface Physics, Oxford University Press, 1983.
Woodruff, D. P., Delchar, A., Cambridge University Press, 1986.
Drummond et al, Journal of Vacuum Science and Technology, 1991.

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