Charged beam radiation apparatus

Details Charged beam radiation apparatus Charged beam radiation apparatus

1986-06-24

1991-04-09

Smith, Jerry

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250310, 250311, 2504922, G01B 1500, G01R 3126

Patent

active

050067958

ABSTRACT:
A charged beam radiation apparatus includes an auxiliary charged beam emitting mechanism, a main charged beam emitting mechanism, a secondary electron detector, and a computer as a controller. The auxiliary charged beam emitting mechanism emits an auxiliary charged beam of a given acceleration voltage onto a predetermined portion of an electronic device to be measured. The main charged beam emitting mechanism emits a main charged beam of an acceleration voltage lower than that of the auxiliary charged beam onto the predetermined portion and the vicinity of the predetermined portion. The secondary electron detector detects secondary electrons generated from a portion irradiated by the main charged beam. The controller measures a change in a secondary electron signal from the secondary electron detector.

REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 4415851 (1983-11-01), Langner et al.
patent: 4417203 (1983-11-01), Pfeiffer et al.
patent: 4567364 (1986-01-01), Kano et al.
patent: 4573008 (1986-02-01), Lischke
patent: 4600839 (1986-07-01), Ichihashi et al.
patent: 4621232 (1986-11-01), Chang et al.

Affiliated with

Also associated with

Rating

Charged beam radiation apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged beam radiation apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged beam radiation apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2037167