Charged beam pattern data generating method and a charged beam p

Details Charged beam pattern data generating method and a charged beam p Charged beam pattern data generating method and a charged beam p

1995-09-28

1998-09-22

Voeltz, Emanuel Todd

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36446828, G06F 1750

Patent

active

058124128

ABSTRACT:
A charged beam pattern data generating method for generating high quality pattern data from the circuit layout design data of a semiconductor device for use by a charged beam drawing apparatus in the production of resist patterns or other semiconductor device manufacturing processes.

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