Charged beam irradiating apparatus having a cleaning means and a

Details Charged beam irradiating apparatus having a cleaning means and a Charged beam irradiating apparatus having a cleaning means and a

1993-12-10

1995-11-14

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

25049221, H01J 3700

Patent

active

054669421

ABSTRACT:
A charged beam irradiating apparatus, comprises a charged beam generating means, a vacuum chamber having a part exposed by the charged beam, the part exposed having contaminations deposited thereon, a gas introducing system connected to the chamber which includes a means for producing electrically neutral active species for removing the contaminations and selectively carrying the species into the chamber, and a system for exhausting the chamber.

REFERENCES:
patent: 4659449 (1987-04-01), Watanabe
patent: 5016663 (1991-05-01), Mase et al.
patent: 5169407 (1992-12-01), Mase et al.
patent: 5308989 (1994-05-01), Brubaker

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