Radiant energy – Means to align or position an object relative to a source or...
Patent
1994-03-15
1996-06-04
Anderson, Bruce C.
Radiant energy
Means to align or position an object relative to a source or...
250397, G01N 23225
Patent
active
055235760
ABSTRACT:
In a charged beam drawing apparatus for drawing a desired pattern on a sample by deflecting a charged beam on the sample while continuously moving a stage on which the sample is placed, a mark having a line-and-space pattern, in which a plurality of heavy metal marks each having a width equal to a side of the charged beam are arranged with spaces each equal to the width between them, is formed on the sample. The charged beam is radiated onto the mark while the position of the beam is fixed, and at the same time the stage is continuously moved in the longitudinal direction of the mark, thereby detecting a reflected beam from the mark. On the basis of the signal of the detected reflected beam, a relative vibration during the continuous movement of the stage is measured. This makes it possible to measure the relative vibration produced by the continuous movement of the stage, resulting in an increase in drawing accuracy.
REFERENCES:
patent: 4327292 (1982-04-01), Wang et al.
patent: 4390788 (1983-06-01), Hayashi et al.
patent: 4503334 (1985-03-01), King et al.
patent: 4791302 (1988-12-01), Nozue
patent: 5043586 (1991-08-01), Giuffre et al.
patent: 5049745 (1991-09-01), Vogen et al.
patent: 5285075 (1994-02-01), Mimamide et al.
patent: 5334846 (1994-08-01), Nakano et al.
Spie, vol. 1088, Optical/Laser Microlithography II, pp. 424-433, 1989, J. D. Buckley, et al., "Step and Scan: A Systems Overview of a New Lithography Tool".
Koike Tooru
Kusakabe Hideo
Miyagaki Atsushi
Mori Ichiro
Sugihara Kazuyoshi
Anderson Bruce C.
Kabushiki Kaisha Toshiba
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