Charge transfer device having a plurality of vertical and horizo

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device

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257241, 257243, 257250, H01L 27148

Patent

active

056506449

ABSTRACT:
A charge transfer device has trapezoidal shape impurity-implanted regions (1, 51, . . . ) in n-type regions (271, 371) at least in the through-paths between a first HCCD (27) and a second HCCD (28), and its isolation regions (41) under the transfer gate (29) are trapezoidal shaped, and thereby charge transfer loss and hence FPN is minimized and the transfer efficiency is much improved.

REFERENCES:
patent: 4965648 (1990-10-01), Yang et al.
patent: 4987466 (1991-01-01), Shibata et al.
patent: 5040071 (1991-08-01), Stevens
patent: 5093849 (1992-03-01), Goto
patent: 5164807 (1992-11-01), Thenwissen
E. Oda et al; "1/2 Inch 768(H)X492(V) Pixel CCD Image Sensor",. IEDM 85, pp. 444-447; 1985 IEEE.

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