Charge transfer device and process of manufacturing the same

Details Charge transfer device and process of manufacturing the same Charge transfer device and process of manufacturing the same

1986-10-15

1988-09-27

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 53, 357 24, H01L 2978

Patent

active

047741996

ABSTRACT:
Process of manufacturing a charge transfer device wherein lower electrodes have enlarged portions and narrowed portions which mesh with the mating portions of any adjacent lower electrode, upper electrodes cover the intervals defined between adjacent lower electrodes and at least part of said enlargened portions thereof, these intervals which are not covered by the upper electrodes are subjected to an impurity diffusion.

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patent: 4402014 (1983-08-01), Carasso et al.
patent: 4613402 (1986-09-01), Losee et al.
Siemens Forschungs-Und Entwicklungsbetichte, vol. 4, No. 4, 1975, pp. 226-230, Springer-Verlag, Berlin, DE; U. Ablassmeier et al.: "CCD-Schaltungen Hoher Speicherdichte in Al-Si-Gate-Technologie".

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