Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1984-04-17
1986-08-12
Williams, Howard S.
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
B03C 500
Patent
active
046054855
ABSTRACT:
A charge injection device is disclosed which issues free charge injected fluid from an orifice (4) into a region of lower pressure downstream. To avoid significant impairment of charge injection level or efficiency by an electrode pair (5, 8) in the region of the orifice (4) due to the reduced downstream pressure, the pressure in the region of orifice (4) is raised, close to the pressure in the charge injection chamber (2), by feeding gas, such as sulfur hexafluoride, to a chamber (18) having an outlet orifice (27) issuing into the lower pressure downstream region.
REFERENCES:
patent: 3928158 (1975-12-01), Fritsche et al.
Exxon Research and Engineering Co.
Simon Jay
Williams Howard S.
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