Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Erosion
Patent
1979-09-17
1982-02-16
Karlsen, Ernest F.
Electricity: measuring and testing
Determining nonelectric properties by measuring electric...
Erosion
357 23, 357 25, G01N 2700, H01L 2978, H01L 2984
Patent
active
043161405
ABSTRACT:
A charge-flow transistor having a source region and a drain region in a semiconductor substrate, a gate insulator and a gapped gate electrode with a gap material having some electrical conductance disposed in the gap thereof.
REFERENCES:
patent: 4103227 (1978-07-01), Zemel
Senturia et al.; "The Charge-Flow Transistor . . ."; Applied Physics Letters; vol. 30; No. 2; Jan. 15, 1977; pp. 106-108.
Engellenner Thomas J.
Karlsen Ernest F.
Massachusetts Institute of Technology
Smith, Jr. Arthur A.
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