Electricity: measuring and testing – A material property using electrostatic phenomenon
Reexamination Certificate
2010-07-23
2011-12-27
Nguyen, Vinh (Department: 2858)
Electricity: measuring and testing
A material property using electrostatic phenomenon
C324S754030
Reexamination Certificate
active
08085052
ABSTRACT:
A charge eliminating apparatus eliminates, when an electrical characteristics test of a target object is performed by moving a mounting table mounting the target object thereon and a probe card relative to each other to bring the target object into electrical contact with the probe card, static electricity of the target object via the mounting table. The charge eliminating apparatus includes a grounding wiring for grounding the mounting table; a relay switch disposed on the grounding wiring; and a switch controller that controls the relay switch to be opened or closed.
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Office Action issued Sep. 20, 2010, in China Pateet Application No. 200710146677.6 (with English translation).
Office Action issued Sep. 20, 2010, in China Pateet Application No. 200710146677.6 (with English translation).
Hanawa Kazuki
Shinohara Eiichi
Nguyen Vinh
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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