Charge coupled device with stripe layers corresponding to CCD re

Details Charge coupled device with stripe layers corresponding to CCD re Charge coupled device with stripe layers corresponding to CCD re

1997-04-28

1999-05-04

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Charge transfer device

257233, 257432, H01L 27148, H01L 29768

Patent

active

059006552

ABSTRACT:
A charge coupled device and a method of manufacturing a charged coupled device includes a semiconductor substrate, a plurality of photoelectrical conversion cells formed in the semiconductor substrate in a matrix form, a plurality of vertical charge coupled device regions formed between the plurality of photoelectrical conversion cells, a plurality of stripe layers formed on the semiconductor substrate and corresponding to the plurality of vertical charge coupled device regions, and a plurality of microlenses formed on the semiconductor substrate and corresponding to the plurality of photoelectrical conversion cells.

REFERENCES:
patent: 5321297 (1994-06-01), Enomoto
patent: 5371397 (1994-12-01), Maegawa et al.
patent: 5422285 (1995-06-01), Ishibe
patent: 5479049 (1995-12-01), Aoki et al.
patent: 5493143 (1996-02-01), Hokari
patent: 5514888 (1996-05-01), Shno et al.
patent: 5534720 (1996-07-01), Song et al.
patent: 5621461 (1997-04-01), Higashide
patent: 5691548 (1997-11-01), Akro

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