Charge coupled device for transferring electric charge

Electrical pulse counters – pulse dividers – or shift registers: c – Counting or dividing in incremental steps – Beam type tube

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377 62, H01L 2978, G11C 1928

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active

046494073

ABSTRACT:
An insulating film O is formed on a semiconductor substrate S. On the insulating film O, first electrodes M.sub.1 are disposed in parallel and second electrodes M.sub.2 are also disposed in parallel. The first electrodes M.sub.1 are insulated from the second electrodes M.sub.2 and the first electrodes M.sub.1 and the second electrodes M.sub.2 are disposed such that one side of a first electrode M.sub.1 and one side of a second electrode M.sub.2 are adjacent to each other. On the surface regions of the semiconductor substrate S between the respective other sides of the first electrodes M.sub.1 and the second electrodes M.sub.2, high concentration regions S.sub.3 are formed using the first and second electrodes M.sub.1 and M.sub.2 as a mask without causing deviation in positioning. To the first electrodes M.sub.1 and the second electrodes M.sub.2, a first clock pulse .phi..sub.1 and a second clock pulse .phi..sub.2 are applied respectively and electric charges are transferred in response to these clock pulses.

REFERENCES:
patent: 3735156 (1973-05-01), Krambeck
patent: 3967306 (1976-06-01), Bower
patent: 4032952 (1977-06-01), Ohba et al.
Hobson Charge-Transfer Devices Edward Arnold, London 1978, pp. 20-27.
Hynecek "Virtual Phase Technology . . . " IEEE Trans. Electron Devices vol. ED-28 (5/81), pp. 483-489.
Hosack "Aperature Response and Optical Performance of Patterned-Electrode Virtual-Phase Imagers IEEE Trans. Electron Devices, vol. ED-28 (1/81), pp. 53-63.
Hynecek "Virtual Phase Technology" IEEE Int. Electron Devices Meeting (12/79), Tech. Dig., pp. 611-614.
Hynecek "Electron-Hole Recombination Antiblooming for Virtual-Phase CCD Imager" IEEE Trans. Electron Devices vol. ED-30 (8/83), pp. 941-948.
Lineback "Clocking Technique Simplifies Structure of Image-Sensing CCD's" Electronics (Jan. 27, 1982), pp. 39-40.

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