Charge control of micro-electromechanical device

Details Charge control of micro-electromechanical device Charge control of micro-electromechanical device

2006-08-08

2006-08-08

Jackson, Stephen W. (Department: 2836)

Electricity: electrical systems and devices

Control circuits for electromagnetic devices

For relays or solenoids

C361S278000

Reexamination Certificate

active

07088566

ABSTRACT:
A charge control circuit for controlling a micro-electromechanical system (MEMS) device having variable capacitor formed by first conductive plate and a second conductive plate separated by a variable gap distance. The charge control circuit comprises a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.

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