Characterization of period variations in diffraction gratings

Details Characterization of period variations in diffraction gratings Characterization of period variations in diffraction gratings

2006-04-04

2006-04-04

Pak, Sung (Department: 2874)

Optics: measuring and testing

By light interference

Having wavefront division

C385S037000

Reexamination Certificate

active

07023562

ABSTRACT:
Methods and systems for interferometrically characterizing diffractive elements are disclosed.

REFERENCES:
patent: 5973786 (1999-10-01), Yoon et al.
patent: 6304332 (2001-10-01), Flynn et al.
patent: 6344898 (2002-02-01), Gemma et al.
patent: 6781701 (2004-08-01), Sweetser et al.
Butler et al., “High perfection chirped grating..,” J. Vac. Sci. Technol. B, 17(6):3217-3221, 1999.
Ardito et al., “Fabrication of Phase Masks for Fiber . . . ,” Microelectronic Engineering, 46:251-254, 1999.
Barnier et al., “Sub-nanometer metrology of chipred . . . ,” Optics Communications, 170:175-179, 1999.
Christopher Palmer, “Diffraction Grating Handbook, Fourth Edition,” Published by the Richardson Grating Laboratory, 705 St. Paul Street, Rochester, New York 14605, 2000, www.gratinglab.com.
Loewen et al., “Diffraction gratings and applications,” Chapter 11, Marcel Dekker Inc. Publisher, 1999, ISBN 0-8247-9923-2.

Affiliated with

Also associated with

Rating

Characterization of period variations in diffraction gratings does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Characterization of period variations in diffraction gratings, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Characterization of period variations in diffraction gratings will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3551424