Characterization and compensation of non-cyclic errors in...

Details Characterization and compensation of non-cyclic errors in... Characterization and compensation of non-cyclic errors in...

2005-10-18

2005-10-18

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

06956655

ABSTRACT:
Systems and methods for characterizing and compensating non-cyclic errors in interferometers and interferometer components are disclosed.

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