Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-30
2007-10-30
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S508000
Reexamination Certificate
active
10981316
ABSTRACT:
In general, in one aspect, the invention features a method that includes monitoring a position of a stage along a first measurement axis and a second measurement axis of a multi-axis interferometry system and determining a position of the stage with respect to another degree of freedom based on the monitored positions along the first and second axes and predetermined information about how the measurement axes deviate from being parallel to one another.
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Connolly Patrick
Fish & Richardson P.C.
Zygo Corporation
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