Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-06-24
1989-07-25
Smith, Jerry
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
250310, 2504922, 324158T, G01R 3126
Patent
active
048517682
ABSTRACT:
In a characteristic test apparatus for an electronic device, a number of voltage supply beams are radiated onto predetermined irradiation positions of the electronic device placed on a sample table. In addition, a potential measuring beam is radiated onto a number of irradiation positions including the predetermined irradiation positions of the voltage supply beams. A secondary electron signal based on the potential measuring beam is detected to measure a potential. When the irradiation position of the potential measuring beam coincides with that of the voltage supply beam, the voltage supply beam is controlled to adjust a potential at the irradiation position to a set value by controlling, e.g., an acceleration power source for the voltage supply beam. When the irradiation position of the potential measuring beam is different from that of the voltage supply beam, a potential at this position is measured. Then, characteristics of the electronic device are calculated based on the obtained potentials at the respective irradiation positions.
REFERENCES:
patent: 3531716 (1970-09-01), Tarui et al.
patent: 3678384 (1972-07-01), Oatley
patent: 4417203 (1983-11-01), Pfeiffer et al.
patent: 4420686 (1983-12-01), Onoguchi et al.
patent: 4460866 (1984-07-01), Feuerbaum et al.
patent: 4573008 (1986-02-01), Lischke
Scanning Electron Microscopy/1981/I(pp. 305-322). SEM Inc., AMF O'Hare (Chicago), Ill. 60666, U.S.A., "Electron Beam Test Techniques for Integrated Circuits".
Scanning Electron Microscopy/1983/(pp. 65-75) SEM Inc., AMF O'Hare (Chicago), Ill. 60666 U.S.A., "Secondary Electron Analyzers for Voltage Measurements".
J. Vac. Sci. Technol., vol. 19, No. 4, "Contactless Electrical Testing . . . " Pfeiffer et al., Nov./Dec. 1981, pp. 1014-1019.
IBM Technical Disclosure Bulletin, vol. 17, No. 10, "Voltage Comparator System for Contactless Microcircuit Testing", DeStafeno et al., Mar. 1975, pp. 2871-2873.
Fujinami Minpei
Kikuchi Akira
Shimazu Nobuo
Wada Kou
Yoshizawa Masahiro
Baker Stephen M.
Nippon Telegraph and Telephone Corporation
Smith Jerry
LandOfFree
Characteristic test apparatus for electronic device and method f does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Characteristic test apparatus for electronic device and method f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Characteristic test apparatus for electronic device and method f will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2360847