Channel ion source

Details Channel ion source Channel ion source

1994-12-30

1997-07-08

Patel, Nimeshkumar

Electric lamp and discharge devices

With positive or negative ion acceleration

3133631, 313154, 313161, 31323101, 31511181, 31511191, 60202, H05H 102, F03H 500

Patent

active

056464762

ABSTRACT:
A gas ionizable to produce a plasma is introduced into a channel within an ion source and into a hollow cathode embedded within the same ion source. A combined anode and manifold is located at a closed end of the channel and gas is introduced into the channel through the combined anode and manifold and into the hollow cathode. A heater and keeper electrode power supply is used to establish a hollow cathode and keeper electrode plasma. A discharge power supply is used to flow electrons from the hollow cathode in a predominately 180.degree. direction to bombard the channel gas distribution and create a channel discharge plasma. A magnetic field generated by a permanent magnet circuit is concentrated by pole pieces at the open end of the channel in an orientation predominately transverse to the channel axis. Energetic electrons from the hollow cathode interact with the concentrated field to simultaneously ionize the channel gas and accelerates these ions through the open channel to form an ion beam. Simultaneously, electrons from the hollow cathode are emitted in a predominately axial direction to space-charge neutralize the ion beam.

REFERENCES:
patent: 4481062 (1984-11-01), Kaufman et al.
patent: 5475354 (1995-12-01), Valentian et al.

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