Chamfer grinding system for wafer

Details Chamfer grinding system for wafer Chamfer grinding system for wafer

1997-05-29

1998-06-23

Eley, Timothy V.

Abrading

Machine

Rotary tool

451287, B24B 500

Patent

active

057696950

ABSTRACT:
Picking up means pick up a wafer from a first cassette one by one and carry the wafer to a pre-processing means. The wafer is picked up from the pre-processing means after the measuring and deciding the position has been completed in the pre-processing means. First carrying means receives the wafer from the picking up means and resets the position of the wafer. The first carrying means mounts the wafer on the wafer table of the first chamfering means in the case that the first chamfering part is not chamfering the wafer. The first carrying means carries the wafer and mounts it on the second wafer table of the second chamfering means in the case that the first chamfering part is chamfering the wafer.

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patent: 5547415 (1996-08-01), Hasegawa et al.
Metalworking Production, Nov. 4, 1968 "Bolt Production".
Dr.-Ing. C. Buchek, Neckarsulm "Die Organisation automatischer Fertigungen", pp. 698-703; Jun. 15, 1956.

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