Chambers, systems, and methods for electrochemically...

Details Chambers, systems, and methods for electrochemically... Chambers, systems, and methods for electrochemically...

2008-04-01

2008-04-01

Wilkins, III, Harry D (Department: 1795)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S240000, C204S260000, C204S263000, C204S264000, C204S266000, C204S272000, C204S275100, C204S278000

Reexamination Certificate

active

10729357

ABSTRACT:
Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit having a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece. The chamber further includes an electrode unit having a plurality of electrodes and a second flow system configured to convey a flow of a second processing fluid at least proximate to the electrodes. The chamber further includes a barrier between the processing unit and the electrode unit to separate the first and second processing fluids. The barrier can be a porous, permeable barrier or a nonporous, semipermeable barrier.

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