Chamber temperature uniformity test fixture

Thermal measuring and testing – Temperature measurement – By electrical or magnetic heat sensor

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374137, 374141, 374208, 392416, 392418, 219391, 437 8, 118712, 118724, 118641, G01K 704, G01K 306, G01K 114

Patent

active

055055443

ABSTRACT:
A fixture for measuring the temperature of a chamber at a number of locations includes a body sized for placement within the chamber, and a number of temperature probes mounted on the body in orientations such that, when the body is placed within the chamber, the probes measure the temperature of the chamber at desired locations. The body also includes adjustable guides which engage the walls of the chamber to assist in positioning the body.

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patent: 4176554 (1979-12-01), Kazmierowicz
patent: 4242907 (1981-06-01), Kazmierowicz
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patent: 5108192 (1992-04-01), Mailliet et al.
patent: 5192132 (1993-03-01), Pelensky
patent: 5228114 (1993-07-01), Suzuki
patent: 5232517 (1993-08-01), Hilborn et al.
Pei-Zhong Xu et al., "Experimental study of substrate temperature" Applied Optics, vol. 28, No. 14, Jul. 15, 1989.
Abstract, Japanese Patent Application 57-73639, Published May 8, 1982, "Temperature Measurement System" Patent Abstacts of Japan, vol. 6, No. 156, Aug. 17, 1982.

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