Optics: measuring and testing – For light transmission or absorption – Of fluent material
Reexamination Certificate
2005-04-26
2005-04-26
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
For light transmission or absorption
Of fluent material
C356S072000, C216S060000, C438S016000
Reexamination Certificate
active
06885452
ABSTRACT:
Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.
REFERENCES:
patent: 4709150 (1987-11-01), Burough et al.
patent: 5047639 (1991-09-01), Wong
patent: 5331409 (1994-07-01), Thurtell et al.
patent: 6154284 (2000-11-01), McAndrew et al.
Jurcik, Jr. Benjamin J.
McAndrew James
Wang Hwa-Chi
American Air Liquide Inc.
Cronin Christopher J.
Russell Linda K.
Smith Zandra V.
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