Chamber, at least for the transport of workpieces, a chamber com

Details Chamber, at least for the transport of workpieces, a chamber com Chamber, at least for the transport of workpieces, a chamber com

1993-10-05

1997-01-07

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414939, B65G 4907

Patent

active

055909949

ABSTRACT:
At least one chamber is provided for transport of workpieces such as storage disks, at least at times, into the vacuum atmosphere, during their manufacturing and comprises at least two exterior openings for the guiding-through of a workpiece. It further comprises a majority of workpiece receiving devices which can be rotated jointly about an axis in an assignment to the openings. At least one transport element is provided and is aligned with an opening. The transport element is disposed in the chamber independently of the rotatable workpiece receiving devices, can be moved out and back in a radially controlled manner in at least one component, and engages on a workpiece in the opening area. A transport method for workpieces in an evacuatable chamber provides that at least two workpieces are rotated about a center in a plane of rotation and are displaced individually in a radial manner with respect to the center of rotation at least in one movement component.

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patent: 5310410 (1994-05-01), Begin et al.
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