Chamber, at least for the transport of workpieces, a chamber com

Details Chamber, at least for the transport of workpieces, a chamber com Chamber, at least for the transport of workpieces, a chamber com

1996-10-10

1999-02-02

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

294 655, 335289, 901 40, B65G 4905

Patent

active

058655883

ABSTRACT:
At least one chamber is provided for transport of workpieces such as storage disks, at least at times, into the vacuum atmosphere, during their manufacturing and comprises at least two exterior openings for the guiding-though of a workpiece. It further comprises a majority of workpiece receiving devices which can be rotated jointly about an axis in an assignment to the openings. At least one transport element is provided and is aligned with an opening. The transport element is disposed in the chamber independently of the rotatable workpiece receiving devices and can be moved out and back in a radially controlled manner in at least one component, and engages on a workpiece in the opening area. A transport method for workpieces in an evacuatable chamber provides that at least two workpieces are rotated about a center in a plane of rotation and are displaced individually in a radial manner with respect to the center of rotation at least in one movement component.

REFERENCES:
patent: 3960279 (1976-06-01), Hartleroad et al.
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4643627 (1987-02-01), Bednorz et al.
patent: 4664578 (1987-05-01), Kokehi
patent: 4735540 (1988-04-01), Allen et al.
patent: 4795299 (1989-01-01), Boys et al.
patent: 4820106 (1989-04-01), Walde et al.
patent: 4886412 (1989-12-01), Wooding et al.
patent: 4886592 (1989-12-01), Anderle et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4969790 (1990-11-01), Petz et al.
patent: 5000652 (1991-03-01), Christensen et al.
patent: 5026239 (1991-06-01), Chiba et al.
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5145227 (1992-09-01), Monford, Jr.
patent: 5310410 (1994-05-01), Begin et al.
patent: 5340261 (1994-08-01), Oosawa et al.
patent: 5428331 (1995-06-01), Graner et al.

Affiliated with

Also associated with

Rating

Chamber, at least for the transport of workpieces, a chamber com does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Chamber, at least for the transport of workpieces, a chamber com, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chamber, at least for the transport of workpieces, a chamber com will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1111153