Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1993-10-05
1996-08-27
Keenan, James W.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
4147443, 414939, 414941, B65G 4907
Patent
active
055494358
ABSTRACT:
A chamber for a vacuum facility comprises at least one opening for the through-transport of workpieces, particularly of circular-disk-shaped workpieces such as storage disks during their treatment, and a transport arrangement, which is movable in a driven manner for at least one workpiece. On the transport arrangement, at least one transport device with a holding device for at least one workpiece is swivellably disposed in a plane perpendicularly to the area of the opening such that the holding device, transported by the transport arrangement into the area of the opening, can be swivelled completely through the opening. Another chamber is arranged in which a rotatably disposed additional transport arrangement for the at least one workpiece is provided which has an axis of rotation that is in parallel to the swivel axis of the transport device. A method for transporting-through at least one disk-shaped workpiece from a respective fixed ring-shaped transport path through an opening inside a vacuum treatment facility, involves transporting the workpiece through radially with respect to the ring-shaped transport path.
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Balzers Aktiengesellschaft
Keenan James W.
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