Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent
1988-06-02
1990-06-26
LaRoche, Eugene R.
Radiant energy
Ionic separation or analysis
Static field-type ion path-bending selecting means
350166, 25037001, 20419211, G02B 110
Patent
active
049366530
ABSTRACT:
A durable quarter wave antireflection coating for a photodetecting device 20, the photodetecting device being formed within a radiation absorbing layer 22 of HgCdTe which is epitaxially grown upon a surface of a substantially transparent Group II-VI substrate 24 having an index of refraction of between approximately 2.2 and 2.8. By example, the substrate 24 may comprise CdZnTe or CdTe. The antireflection coating 26 is formed upon a radiation receiving surface of the substrate 24. The antireflection coating may comprise a layer of CeO.sub.x F.sub.(3.0-x), where x has a value within the range of approximately zero to approximately 1.0. The CeO.sub.x F.sub.(3.0-x) layer is formed by an ion beam sputter technique, the CeO.sub.x F.sub.(3-x) layer being sputtered from a source comprised of CeF.sub.3 in the presence of a predetermined pressure of oxygen. In general, the antireflection coating may comprise a fluoride compound formed with a metal of the Lanthanide rare earth series which is substantially transparent to infrared radiation.
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Thin Solid Films, vol. 148, No. 1, 30 Mar. 1987, I. Lubezky et al., "Activated Reactive Evaporation of a Transparent Conductive Coating for the IR Region", pp. 83-92.
Solar Cells, vol. 3, No. 1, Feb. 1981, S. F. Pellicori: "Wide Band Wide Angle Reflection-Reducing Coatings for Silicon Cells", pp. 57-63.
Applied Optics, vol. 22, No. 12, 15 Jun. 1983, Optical Society of America, I. Lubezky et al.: "Efficient and Durable AR Coatings for Ge in the 8-11-.mu.m Band Using Synthesized Refractive Indicies by Evaporation of Homogeneous Mixtures", pp. 1828-1831.
Pellicori Samuel F.
Schemmel Terence D.
Denson-Low W. K.
LaRoche Eugene R.
Nguyen Thong
Santa Barbara Research Center
Schubert W. C.
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