Cerium-based abrasive material slurry and method for...

Details Cerium-based abrasive material slurry and method for... Cerium-based abrasive material slurry and method for...

2005-05-17

2005-05-17

Marcheschi, Michael (Department: 1755)

Abrasive tool making process, material, or composition

With inorganic material

C051S309000, C106S003000, C423S263000

Reexamination Certificate

active

06893477

ABSTRACT:
The present invention provides a cerium-based abrasive slurry particles including a cerium-based abrasive particle of no less than 95% by weight of total rare earth oxides (TREO), in which the cerium-based abrasive particle has less than 3% by weight of fluorine content of TREO, and a particle size distribution determined by a laser diffraction method is within a predetermined range. And adhesion property is further improved by setting this fluorine content in 0.005 to 0.5% by weight of TREO.

REFERENCES:
patent: 6551175 (2003-04-01), Koichi et al.
patent: 2001-11432 (2001-01-01), None
patent: 2001-35818 (2001-02-01), None
patent: 2001-89748 (2001-04-01), None
patent: 2002-194334 (2002-07-01), None

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