Ceramic-titanium nitride electrostatic chuck

Details Ceramic-titanium nitride electrostatic chuck Ceramic-titanium nitride electrostatic chuck

1993-06-03

1995-01-17

Nakarani, D. S.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

279128, 361234, 428450, 428469, 428472, 501 96, B32B 1800

Patent

active

053824695

ABSTRACT:
Proposed is a ceramic-made electrostatic chuck consisting of two insulating ceramic layers and a metallic electrode layer integrally sandwiched between the two insulating layers, which has a very quick response characteristic to turning-on and -off of the electric voltage applied to the electrodes without affecting the very high electrostatic attracting force. This improvement can be obtained by forming the insulating ceramic layers from a specific ceramic material consisting of a highly resistive ceramic material such as alumina and the like and titanium nitride admixed with the former in an amount not exceeding 5% by weight but sufficient to impart the insulating ceramic layers with a volume resistivity in the range from 1.times.10.sup.8 to 1.times.10.sup.13 ohm.cm at 20.degree. C.

REFERENCES:
patent: 4692836 (1987-09-01), Suzuki
patent: 5104834 (1992-04-01), Watanabe et al.
patent: 5151845 (1992-09-01), Watanabe et al.
patent: 5191506 (1993-03-01), Logan et al.
patent: 5280156 (1994-01-01), Niori et al.

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