Ceramic susceptor and a method of cleaning the same

Details Ceramic susceptor and a method of cleaning the same Ceramic susceptor and a method of cleaning the same

2007-08-28

2007-08-28

Carrillo, Sharidan (Department: 1746)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S002000, C134S003000, C134S006000, C134S007000, C134S028000, C134S036000, C134S041000, C134S042000, C134S902000

Reexamination Certificate

active

11087094

ABSTRACT:
An object of the present invention is to provide a ceramic susceptor for considerably reducing the count number of metal atoms on the surface of a semiconductor after the semiconductor is treated, specifically to 1×1010atoms/cm2or lower. It is provided a ceramic susceptor2having a face for mounting semiconductor2awherein each of metal elements other than metal element(s) constituting the ceramic material has a count number of 1×1011atoms/cm2or lower. It is further provided a method of cleaning a ceramic susceptor2having a face2afor mounting semiconductor, wherein the susceptor is cleaned using a complexing agent capable of forming a complex with a metal element.

REFERENCES:
patent: 5498293 (1996-03-01), Ilardi et al.
patent: 5837662 (1998-11-01), Chai et al.
patent: 5885362 (1999-03-01), Morinaga et al.
patent: 5895781 (1999-04-01), Neumiller et al.
patent: 5981449 (1999-11-01), Rapisarda et al.
patent: 6423148 (2002-07-01), Aoki
patent: 6498131 (2002-12-01), Small et al.
patent: 6565667 (2003-05-01), Haerle et al.
patent: 2001/0020478 (2001-09-01), Kojima et al.
patent: 2003/0080333 (2003-05-01), Yamaguchi et al.
patent: 2004/0099290 (2004-05-01), Morinaga et al.
patent: 2005/0181617 (2005-08-01), Bosch
patent: 2005/0211703 (2005-09-01), Kiku et al.
patent: 2003-136027 (2003-05-01), None
U.S. Appl. No. 11/032,939, filed Jan. 11, 2005, Yamaguchi et al.

Affiliated with

Also associated with

Rating

Ceramic susceptor and a method of cleaning the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ceramic susceptor and a method of cleaning the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ceramic susceptor and a method of cleaning the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3891123