Ceramic susceptor

Details Ceramic susceptor Ceramic susceptor

2008-07-01

2008-07-01

Paik, Sang Y. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S725000

Reexamination Certificate

active

11160825

ABSTRACT:
Ceramic susceptor whose wafer-retaining face has superior isothermal properties, and that is suited to utilization in apparatuses for manufacturing semiconductors and in liquid-crystal manufacturing apparatuses. In plate-shaped sintered ceramic body1, resistive heating element2is formed. Fluctuation in pullback length L between sintered ceramic body outer-peripheral edge1aand resistive heating element substantive-domain outer-peripheral edge2ais within ±0.8%, while isothermal rating of the entire surface of the wafer-retaining face is ±1.0% or less. Preferable is a superior isothermal rating of ±0.5% or less that can be achieved by bringing the fluctuation in pullback length L to within ±0.5%.

REFERENCES:
patent: 6946625 (2005-09-01), Kuibira et al.
patent: H10-189225 (1998-07-01), None
patent: H11-074064 (1999-03-01), None
patent: H11-273839 (1999-10-01), None
patent: 2000-164336 (2000-06-01), None

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