Ceramic susceptor

Details Ceramic susceptor Ceramic susceptor

2005-09-20

2005-09-20

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S543000

Reexamination Certificate

active

06946625

ABSTRACT:
Ceramic susceptor whose wafer-retaining face has superior isothermal properties, and that is suited to utilization in apparatuses for manufacturing semiconductors and in liquid-crystal manufacturing apparatuses. In plate-shaped sintered ceramic body1, resistive heating element2is formed. Fluctuation in pullback length L between sintered ceramic body outer-peripheral edge1aand resistive heating element substantive-domain outer-peripheral edge2ais within ±0.8%, while isothermal rating of the entire surface of the wafer-retaining face is ±1.0% or less. Preferable is a superior isothermal rating of ±0.5% or less that can be achieved by bringing the fluctuation in pullback length L to within ±0.5%.

REFERENCES:
patent: 6080970 (2000-06-01), Yoshida et al.
patent: 6133557 (2000-10-01), Kawanabe et al.
patent: 6204489 (2001-03-01), Katsuda et al.
patent: 6806443 (2004-10-01), Kuibira et al.

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