Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-07-18
2006-07-18
Fuqua, Shawntina T. (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S460100, C219S461100, C219S465100, C219S543000, C219S546000, C219S468100, C219S548000
Reexamination Certificate
active
07078655
ABSTRACT:
A ceramic substrate for semiconductor manufacture and/or inspection which is conducive to decrease in α-rays radiated to prevent electrical errors, and to decrease an electrostatic chucking force such as heater or wafer prober, generation of particles, and circuit defects. The ceramic substrate is configured such that the level of α-rays radiated from the surface of the ceramic substrate is not higher than 0.250 c/cm2.hr.
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Hiramatsu Yasuji
Ito Yasutaka
Fuqua Shawntina T.
Ibiden Co. Ltd.
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