Ceramic substrate

Details Ceramic substrate Ceramic substrate

2005-07-19

2005-07-19

Lam, Cathy (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

C219S544000

Reexamination Certificate

active

06919124

ABSTRACT:
The present invention provides a ceramic substrate for use in an apparatus for manufacturing and inspecting semiconductors. The ceramic substrate comprises a through-hole having excellent tolerance performance against a drawing stress applied to an external terminal pin. The through-hole is provided with a projection which protrudes into the ceramic substrate made of aluminum nitride as primary component.

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U.S. Appl. No. 09/673,953, non final.
U.S. Appl. No. 09/524,010, ABN.
U.S. Appl. No. 09/471,759, non final.
U.S. Appl. No. 09/462,067, filed reply brief.

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