Ceramic resistor and electrostatic chuck having an aluminum nitr

Details Ceramic resistor and electrostatic chuck having an aluminum nitr Ceramic resistor and electrostatic chuck having an aluminum nitr

1997-04-30

1998-07-07

Gellner, Michael L.

Electrical resistors

With base extending along resistance element

Resistance element coated on base

338309, 501 984, 427101, H01C 1012

Patent

active

057775435

ABSTRACT:
A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum nitride crystal phase, and is doped with at least one kind of atoms selected from the group consisting of elements of the Groups 2b, 4b and 6b of periodic table, and exhibits a volume resistivity of not larger than 10.sup.14 .OMEGA.-cm at 25.degree. C.

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