Electrical resistors – With base extending along resistance element – Resistance element coated on base
Patent
1995-02-09
1997-09-16
Walberg, Teresa J.
Electrical resistors
With base extending along resistance element
Resistance element coated on base
338309, 279128, H01C 1012
Patent
active
056685246
ABSTRACT:
A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum nitride crystal phase, and is doped with at least one kind of atoms selected from the group consisting of elements of the Groups 2b, 4b and 6b of periodic table, and exhibits a volume resistivity of not larger than 10.sup.14 .OMEGA.-cm at 25.degree. C.
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Aida Hiroshi
Kitazawa Kenji
Mikami Kazuhiko
Easthom Karl
Kyocera Corporation
Walberg Teresa J.
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