Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2006-08-23
2008-12-23
Rose, Robert (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S443000, C051S307000
Reexamination Certificate
active
07467989
ABSTRACT:
A ceramic polishing pad dresser and the method for fabricating the same are provided. Abrasive particles are adhered onto a ceramic substrate by heating a ceramic powder to be vitrified, thus forming a ceramic diamond disk. Meanwhile, a plastic base is mounted on the bottom of the ceramic diamond disk. As for heating the ceramic powder to be vitrified, the ceramic powder with low melting point is disposed on the ceramic substrate, and to be heated to form a vitrified adhering layer, so as to adhere the abrasive particles disposed thereon to the ceramic substrate. The plastic base mounted on the bottom of the ceramic diamond disk is provided for bearing the ceramic diamond disk and has corresponding screw holes and positioning holes formed thereon for fitting the chemical mechanical polishing table to be mounted and reducing the manufacturing cost.
REFERENCES:
patent: 2118409 (1938-05-01), Loewy
patent: 4907376 (1990-03-01), Bouchard et al.
patent: 6293854 (2001-09-01), Kimura et al.
Chen Yu-Tai
Huang Wei
Lin Hsiu-Yi
Tseng Chou-Chih
Kinik Company
Rose Robert
Workman Nydegger
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