Ceramic microelectromechanical structure

Details Ceramic microelectromechanical structure Ceramic microelectromechanical structure

2006-04-25

2006-04-25

Tran, CongVan (Department: 2688)

Telecommunications

Transmitter and receiver at separate stations

Having diverse art device

C455S074000, C455S344000, C029S825000, C335S001000, C335S078000

Reexamination Certificate

active

07035591

ABSTRACT:
A microelectromechanical structure and method is disclosed. A ceramic substrate preferably is formed from low temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can e a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. In one aspect of the invention, a switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.

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