Ceramic member

Details Ceramic member Ceramic member

2006-08-01

2006-08-01

Xu, Ling (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

C428S201000, C428S213000, C428S215000, C428S220000, C428S908800, C428S696000, C428S697000, C428S701000, C428S702000, C428S699000, C118S7230AN

Reexamination Certificate

active

07083846

ABSTRACT:
A ceramic member, which is usable in a state where at least a part thereof is exposed in a reactor in which halogen plasma is generated, includes a base member containing a first ceramic material, and a coating layer on a surface of the base member containing a second ceramic material more resistant to plasma etching than the first ceramic material. Further, the ceramic member includes a thick portion in a region where an etching rate of the coating layer by the halogen plasma is locally high, and a thickness (tt) of the thick portion and a thickness (tn) of a normal thickness portion other than the thick portion satisfy the following expression (1):in-line-formulae description="In-line Formulae" end="lead"?tn<tt≦(Ee/En)×tn  (1)in-line-formulae description="In-line Formulae" end="tail"?whereEn: etching rate of the coating layer in the normal thickness portion; andEe: etching rate of the coating layer in the thick portion.

REFERENCES:
patent: 2001-044179 (2001-02-01), None

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