Ceramic material resistant to halogen plasma and member...

Details Ceramic material resistant to halogen plasma and member... Ceramic material resistant to halogen plasma and member...

2005-07-12

2005-07-12

Stein, Stephen (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S304400, C428S332000, C428S446000, C428S699000, C428S701000, C428S702000, C501S152000, C501S153000

Reexamination Certificate

active

06916559

ABSTRACT:
A member used within a plasma processing apparatus and exposed to a plasma of a halogen gas such as BCl3or Cl2is formed from a sintered body of metals of Group IIIa of Periodic Table such as Y, La, Ce, Nd and Dy, and Al and/or Si, for example, 3Y2O3.5Al2O3, 2Y2O3.Al2O3, Y2O3.Al2O3or disilicate or monosilicate, and in particular, in this sintered body, the content of impurity metals of Group IIa of Periodic Table contained in the sintered body is controlled to be 0.15 wt % or more in total. Specifically, for this member, an yttrium-aluminum-garnet sintered body having a porosity of 3% or less and also having a surface roughness of 1 μm or less in center line average roughness Ra is utilized.

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