Ceramic heaters and heating devices using such ceramic heaters

Details Ceramic heaters and heating devices using such ceramic heaters Ceramic heaters and heating devices using such ceramic heaters

1994-12-20

1997-11-04

Evans, Geoffrey S.

Electric heating

Heating devices

With heating unit structure

219385, H05B 344, F27D 1100

Patent

active

056836066

ABSTRACT:
A ceramic heater includes a substrate made of aluminum nitride, a resistive heating element buried in the substrate and made of a metal having a high melting point, and terminals electrically connected to the resistive heating element and buried in said substrate. The terminals are made of a metal having a high melting point and a coefficient of thermal expansion not smaller than that of the substrate. The metal of the resistive heating element has a coefficient of thermal expansion not smaller than that of the substrate. The coefficient of thermal expansion of each of the terminals and the resistive heating element is in a range from 5.0.times.10.sup.-6 /.degree.C. to 8.3.times.10.sup.-6 /.degree.C.

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