Ceramic heaters, a method for producing the same and...

Details Ceramic heaters, a method for producing the same and... Ceramic heaters, a method for producing the same and...

2006-10-24

2006-10-24

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000, C029S611000

Reexamination Certificate

active

07126090

ABSTRACT:
A ceramic heater is provided including a ceramic sintered body and a heat resistor embedded in the substrate, wherein a change in the temperature uniformity on the heating face is reduced. The heat resistor contains a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table and a carbide of the metal. A ratio (Ic/Im) of a total strength (Ic) of main peak of the metal carbide to a total strength (Im) of main peak strength of the metal is not larger than 0.2. Alternatively, the ratio (Rb−Ra)/Ra is not larger than 30 percent, where “Ra” is the resistance of the heat resistor before sintering and “Rb” is the resistance of the heat resistor after sintering.

REFERENCES:
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patent: 6080970 (2000-06-01), Yoshida et al.
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patent: 6204489 (2001-03-01), Katsuda et al.
patent: 11-251039 (1999-09-01), None
patent: 2000-068038 (2000-03-01), None

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