Ceramic heaters

Details Ceramic heaters Ceramic heaters

2007-02-06

2007-02-06

Paik, Sang Y. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S725000

Reexamination Certificate

active

10998392

ABSTRACT:
An object of the present invention is to provide a heater having a ceramic substrate with a through hole formed therein so that the uniformity of temperature on the heating face of the substrate can be improved and the use life of the ceramic substrate can be improved upon thermal cycles. A ceramic heater comprises a substrate made of a ceramic material and having a heating face where three or more zones3C,3F are allocated, heating resistances corresponding to the zones, respectively, and terminals5C electrically connected to the heating resistances, respectively. Three or more holes4are formed in the substrate. Distances of the terminals5C and the wall surfaces facing the holes4are 8 mm or more, respectively. The heating resistance15intersects a straight line16connecting the center of the terminal and the center4aof the hole in a plan view.

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