Ceramic heater for semiconductor manufacturing/testing...

Details Ceramic heater for semiconductor manufacturing/testing... Ceramic heater for semiconductor manufacturing/testing...

2005-05-24

2005-05-24

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S460100, C219S461100, C219S465100, C219S466100, C219S543000, C219S467100, C219S468100

Reexamination Certificate

active

06897414

ABSTRACT:
A ceramic beater for a semiconductor producing/examining device having a resistance heating element superior in adhesion to a substrate. The ceramic heater includes a ceramic substrate and a resistance heating element formed on the surface of the ceramic substrate. Further, irregularities are formed on the side face of the resistance heating element.

REFERENCES:
patent: 4002883 (1977-01-01), Hurko
patent: 6080970 (2000-06-01), Yoshida et al.
patent: 6465763 (2002-10-01), Ito et al.
patent: 6475606 (2002-11-01), Niwa
patent: 6507006 (2003-01-01), Hiramatsu et al.
patent: 6677557 (2004-01-01), Ito et al.
patent: 20020043527 (2002-04-01), Ito
patent: 20030015521 (2003-01-01), Ito
patent: 5-307994 (1993-11-01), None
patent: 9-40481 (1997-02-01), None

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