Ceramic heater and method for manufacturing the same

Details Ceramic heater and method for manufacturing the same Ceramic heater and method for manufacturing the same

2007-10-16

2007-10-16

Robinson, Daniel (Department: 3742)

Electric heating

Heating devices

Resistive element: igniter type

C219S544000

Reexamination Certificate

active

10207088

ABSTRACT:
A ceramic heater1includes a silicon nitride ceramic substrate13and a resistance-heating member10embedded in the silicon nitride ceramic substrate13. The silicon nitride ceramic substrate13contains oxygen derived from a sintering aid at an average concentration of 0.4–3.2% by weight in a surface layer portion extending from the surface thereof to a depth of 1 mm. The ceramic heater1can be manufactured by firing through hot pressing. A firing jig for use in a firing process has an SiC—C composite layer which is formed therein along the surface of cavities thereof while having a predetermined depth as measured from the cavity surface.

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