Ceramic heater and manufacturing method of ceramic heater

Details Ceramic heater and manufacturing method of ceramic heater Ceramic heater and manufacturing method of ceramic heater

2005-08-02

2005-08-02

Paik, Sang Y. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S548000, C118S724000

Reexamination Certificate

active

06924464

ABSTRACT:
A ceramic heater manufacturing method capable of preventing reflection of a laser beam at the time the performing trimming by irradiation using a laser beam and performing trimming of a resistance heating element or a conductor layer. The ceramic heater manufacturing method includes forming a resistance heating element having a pattern on a surface of a ceramic substrate; and irradiating a laser beam onto the resistance heating element to form a gutter or a cut after a preceding step to adjust a resistance value of the resistance element. When the resistance heating element is formed on the surface of the ceramic substrate, the resistance heating element is adjusted to have a surface roughness Ra of 0.01 μm or more in accordance with MS B 0601.

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