Ceramic heater

Details Ceramic heater Ceramic heater

1986-06-16

1987-09-01

Swisher, Nancy A.

Stock material or miscellaneous articles

Composite

Of silicon containing

428428, 428698, 428699, 252518, 252548, 219548, B32G 904, H05G 310

Patent

active

046908722

ABSTRACT:
A ceramic heater comprising a ceramic substrate is described which has formed thereon a layer of a silicide of an element selected from groups IVa, Va and VIa of the periodic table. The heater has stable temperature vs. resistance characteristics, has high mechanical strength and produces the desired temperature in a very short period of time.

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