Ceramic heater

Details Ceramic heater Ceramic heater

2005-05-03

2005-05-03

Paik, S. (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S543000

Reexamination Certificate

active

06888106

ABSTRACT:
A ceramic heater making it possible to prevent a short circuit in its resistance heating element and heat a semiconductor wafer evenly. The ceramic beater includes a ceramic substrate, an insulating layer having volume resistivity higher than that of the ceramic substrate, being formed on at least a part of the ceramic substrate, and a resistance heating element formed on the insulating layer.

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